Adhesion adjustable PDMS stamp based on micro-balloon actuator array for transfer printing process of microdevices

제목
Adhesion adjustable PDMS stamp based on micro-balloon actuator array for transfer printing process of microdevices
저자
김병희서영호박찬진
발행일
2010-11-09
학회명
MNC2010(23rd International Microprocesses and Nanotechnology Conference)
개최국가
일본
학회 개최일
2010-11-09 ~ 2010-11-12