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BEOL compatible ultra-low operating voltage (0.5 V) and preconfigured switching polarization states in effective 3 nm ferroelectric HZO capacitors
- 김시준;
- 박성빈;
- 강종묵;
- Minjong Lee;
- Jin-Hyun Kim;
- 외 9명
- 제목
- BEOL compatible ultra-low operating voltage (0.5 V) and preconfigured switching polarization states in effective 3 nm ferroelectric HZO capacitors
- 저자
- 김시준; 박성빈; 강종묵; Minjong Lee; Jin-Hyun Kim; Dan N. Le; Seojun Lee; Si-Un Song; 최리노; 안영배; 류승욱; 차필령; Chang-Yong Nam; Jiyoung Kim
- 발행일
- 2024-06-20
- 학회명
- 2024 IEEE Symposium on VLSI Technology and Circuits
- 개최국가
- 미국
- 학회 개최일
- 2024-06-20 ~ 2024-06-20