ScholarWorks@강원대학교

상세 보기

The Transient Behavior of Chemical Species as Precursors for Particle Formation in Silane PCVD

  • 김교선
제목
The Transient Behavior of Chemical Species as Precursors for Particle Formation in Silane PCVD
저자
김교선
발행일
1997-08-18
학회 개최일
1997-08-18 ~ 1997-08-18

ScholarWorks@강원대학교

(24341)강원특별자치도 춘천시 강원대학길 1(효자동) 강원대학교 춘천캠퍼스 중앙도서관 Tel. 033-250-8006, 8025

COPYRIGHT © 강원대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.