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A thorough study of thin film gate oxide degradation during fabrication of advanced CMOSFET's
- 제목
- A thorough study of thin film gate oxide degradation during fabrication of advanced CMOSFET's
- 저자
- 이원규
- 발행일
- 2001-07
- 학회명
- 2001 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices
- 개최국가
- 대한민국
- 학회 개최일
- 2001-07 ~ 2001-07