A thorough study of thin film gate oxide degradation during fabrication of advanced CMOSFET's

제목
A thorough study of thin film gate oxide degradation during fabrication of advanced CMOSFET's
저자
이원규
발행일
2001-07
학회명
2001 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices
개최국가
대한민국
학회 개최일
2001-07 ~ 2001-07