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Effect of Coil Current on Crysatallinity of Suptter Deposited AlN Film

  • 김송희
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Effect of Coil Current on Crysatallinity of Suptter Deposited AlN Film
저자
김송희
발행일
2008-06-16
학회명
INTERFINISH 2008
개최국가
대한민국
학회 개최일
2008-06-16 ~ 2008-06-19

ScholarWorks@강원대학교

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