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Strategy for low temperature HZO ferroelectric capacitors for back-end of line applications
- 김시준;
- Jin-Hyun Kim;
- Minjong Lee;
- Seojun Lee;
- Yong Chan Jung;
- 외 3명
- 제목
- Strategy for low temperature HZO ferroelectric capacitors for back-end of line applications
- 저자
- 김시준; Jin-Hyun Kim; Minjong Lee; Seojun Lee; Yong Chan Jung; Jiyoung Kim; 최리노; 김현재
- 발행일
- 2023-03-07
- 학회명
- IEEE Electron Devices Technology and Manufacturing (EDTM) Conference 2023
- 개최국가
- 대한민국
- 학회 개최일
- 2023-03-07 ~ 2023-03-10