Inductively-coupled nonthermal plasma for synthesis of silicon nanocrystals

초록

Silicon nanocrystals (Si NCs) with an average diameter of 17.7 nm were synthesized using a flow-through, inductively-coupled nonthermal plasma. The crystalline Si nanoparticles (NPs) were confirmed by using transmission electron microscope (TEM) images, X-ray diffraction (XRD) analyses, and Raman spectroscopy measurements. In addition, scanning electron microscope (SEM) measurements showed that the use of a nonthermal plasma prevented the agglomeration of the Si NPs. These Si NCs synthesized by using a nonthermal plasma can be applied to various interesting fields such as photovoltaic cells, labels for biosensors, light-emitting diodes, and so forth.

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