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Role of hydrogen in the grain growth in microcrystalline silicon films

  • 윤종환
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Role of hydrogen in the grain growth in microcrystalline silicon films
저자
윤종환
발행일
2006-04-17
학회명
2006 Materials Research Society Syposium
개최국가
미국
학회 개최일
2006-04-17 ~ 2006-04-17

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