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Modeling of Particle dynamics inside the Silane PCVD Reactor for Semiconductor Processing

  • 김교선
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Modeling of Particle dynamics inside the Silane PCVD Reactor for Semiconductor Processing
저자
김교선
발행일
2000-04
학회명
2nd seminar on core univ. program between japan and korea
개최국가
일본
학회 개최일
2000-04 ~ 2000-04

ScholarWorks@강원대학교

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