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In-situ FTIR study of oxygen source mixing for hafnium oxide atomic layer deposition on titanium nitride
- 김시준;
- Jin-Hyun Kim;
- Jiyoung Kim;
- Dan Le;
- Minjong Lee;
- 외 5명
- 제목
- In-situ FTIR study of oxygen source mixing for hafnium oxide atomic layer deposition on titanium nitride
- 저자
- 김시준; Jin-Hyun Kim; Jiyoung Kim; Dan Le; Minjong Lee; T. Chu; D. Kim; J. Veyan; M. Benham; J. Spiegelman
- 발행일
- 2024-08-05
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2024
- 개최국가
- 핀란드
- 학회 개최일
- 2024-08-05 ~ 2024-08-05