Preparation of PbZrO3 thin films by plasma enhanced metalorganic chemical vapor deposition

초록

PbZrO<inf>3</inf> thin films were prepared using plasma enhanced metalorganic chemical vapor deposition. The composition of the films was analyzed using energy dispersive X-ray spectroscopy (EDX) and wavelength dispersion X-ray spectroscopy (WDX). The crystal structures were evaluated using X-ray diffraction. It was found that the PbZrO<inf>3</inf> thin films with increased Zr concentration were not easily transformed to perovskite phase in spite of a high annealing temperature.