상세 보기
High endurance of back-end-of-line compatible ferroelectric Hf0.5Zr0.5O2 thin films through low temperature annealing
- 김시준;
- 박혜련;
- 박성빈;
- 강종묵;
- Seojun Lee;
- 외 2명
- 제목
- High endurance of back-end-of-line compatible ferroelectric Hf0.5Zr0.5O2 thin films through low temperature annealing
- 저자
- 김시준; 박혜련; 박성빈; 강종묵; Seojun Lee; Jin-Hyun Kim; Jiyoung Kim
- 발행일
- 2023-08-02
- 학회명
- US-Korea Conference on Science, Technology, and Entrepreneurship (UKC) 2023
- 개최국가
- 미국
- 학회 개최일
- 2023-08-02 ~ 2023-08-05