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Integrating machine learning into atomic layer deposition: a case study on hafnium oxide process optimization
- 김시준;
- Minjong Lee;
- Doo San Kim;
- Thi Thu Huong Chu;
- Dushyant M. Narayan;
- 외 3명
- 제목
- Integrating machine learning into atomic layer deposition: a case study on hafnium oxide process optimization
- 저자
- 김시준; Minjong Lee; Doo San Kim; Thi Thu Huong Chu; Dushyant M. Narayan; Dan N. Le; Soubhik De; Jiyoung Kim
- 발행일
- 2025-06-23
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2025
- 개최국가
- 대한민국
- 학회 개최일
- 2025-06-23 ~ 2025-06-23