Study on removal of shoulders at laser ablated indium tin oxide film edge

초록

A diode-pumped Q-switched Nd:YVO(4) laser (lambda = 1064 nm) was used for the fabrication of plasma display panel (PDP) bus electrodes. In the experiments, with the maskless laser direct patterning of indium tin oxide (ITO) films, the laser-ablated ITO patterns showed the formation of shoulders at the edge of the ITO lines and a ripplelike structure with the etched bottom compared with the chemically wet-etched ITO patterns. Using a Q-switched Nd:YVO(4) laser and a galvanometric scanning system, 500 mm/s with a 40 kHz repetition rate was found to be appropriate for application to PDP manufacturing. By dipping the laser-ablated ITO films in the chemical etching solution for 30 s at 50 degrees C, the shoulders were effectively removed without affecting the discharging properties of ac-PDP.

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