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The impact of oxygen source on the formation of TiN interface at the initial stage ALD process of hafnia-based ferroelectrics: an in-situ analysis
- 김시준;
- Jin-Hyun Kim;
- Jiyoung Kim;
- Yong Chan Jung;
- Su Min Hwang;
- 외 8명
- 제목
- The impact of oxygen source on the formation of TiN interface at the initial stage ALD process of hafnia-based ferroelectrics: an in-situ analysis
- 저자
- 김시준; Jin-Hyun Kim; Jiyoung Kim; Yong Chan Jung; Su Min Hwang; H. Hernandez-Arriaga; A. Khosravi; S. Kim; Dan Le; K. Tan; Minjong Lee; J. Spiegelman; M. Benham
- 발행일
- 2023-07-23
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2023
- 개최국가
- 미국
- 학회 개최일
- 2023-07-23 ~ 2023-07-26