Computational and Experimental Analysis of Flow Behavior of thin Polymer Film in Spin-coating Process

제목
Computational and Experimental Analysis of Flow Behavior of thin Polymer Film in Spin-coating Process
저자
김헌영
발행일
2005-10-09
학회명
Advanced Technology of Plasticity 2005, Proceedings of the 8th ICTP
개최국가
이탈리아
학회 개최일
2005-10-09 ~ 2005-10-09