Effect of electrode work-function asymmetry on built-in fields in ferroelectric ALD-HZO thin films

제목
Effect of electrode work-function asymmetry on built-in fields in ferroelectric ALD-HZO thin films
저자
김시준; 엄한돈; 김예찬; 김호영; 김건휘; 한예진; 이승빈; 박수혁; 민현홍; 장광현
발행일
2026-01-27
학회명
한국반도체학술대회 (The Korean Conference on Semiconductors (KCS))
개최국가
대한민국
학회 개최일
2026-01-27 ~ 2026-01-30