반응가스 비율에 따른 탄소나노월의 성장특성

초록

Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway toincreased the reaction area of graphite electrodes used carbon nanotube (CNT) and porous carbon. CNT is limited todevice utilization in order to used a metal catalyst by lack of surface area to improve. In contrast carbon nanowall(CNW) is chemically very stable. So this paper, microwave plasma enhanced chemical vapor deposition (PECVD) systemwas used to grow carbon nanowall (CNW) on Si substrate with methane (CH4) and hydrogen (H2) gases. To find thegrowth properties of CNW according to the reaction gas ratio, we have changed the methane to hydrogen gas ratios(4:1, 2:1, 1:2, and 1:4). The vertical and surficial conditions of the grown CNW according to the gas ratios werecharacterized by a field emission scanning electron microscopy (FE-SEM) and Raman spectroscopy measurementsshowed structure variations.

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