Investigation of the heteroepitaxial growth of GaN directly on SiC(0001) by plasma-assisted molecular beam epitaxy

제목
Investigation of the heteroepitaxial growth of GaN directly on SiC(0001) by plasma-assisted molecular beam epitaxy
저자
임성환
발행일
2002-08
학회명
Electronic Materials Conference
개최국가
미국
학회 개최일
2002-08 ~ 2002-08