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Rotating Inductively Coupled Plasma Reactor for Particle Coating

  • 김교선; 
  • 김동주
제목
Rotating Inductively Coupled Plasma Reactor for Particle Coating
저자
김교선; 김동주
발행일
2007-11-08
학회명
International Conference on Nanoscience and Nanotechnology
개최국가
대한민국
학회 개최일
2007-11-08 ~ 2007-11-08

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