Realization of shifts in threshold voltage and subthreshold swing in atomic layer deposited zinc oxide as channel layer through in-situ half-cycle analysis

제목
Realization of shifts in threshold voltage and subthreshold swing in atomic layer deposited zinc oxide as channel layer through in-situ half-cycle analysis
저자
김시준
발행일
2018-10-21
학회명
AVS International Symposium & Exhibition 2018
개최국가
미국
학회 개최일
2018-10-21 ~ 2018-10-26