Plasma oxidation of thermally grown graphenes and their characterization

초록

We report the plasma oxidation of thermally synthesized graphenes and their characterization using Raman spectroscopy and atomic force microscope (AFM). A graphene was synthesized by thermal chemical vapor deposition with methane and transferred onto trench substrate to make suspended configuration in order to exclude substrate effects. The air plasma treatment at 0.4 W for 5 min and property characterization were alternately performed to address the effect of oxidation. After the oxidation, a drastic change in Raman spectra was observed, which implies that considerable structural changes occurred in the graphene. Interestingly, we observed from the Raman and AFM analyses that the number of layers can be reduced by the controlled plasma oxidation treatment. The results may open the possibility of graphene formation from graphite sheets through the precise control of plasma treatment conditions. (C) 2012 Elsevier Ltd. All rights reserved.

키워드