Formation of zirconium titanate from multi-layered structure of ZrO2 and TiO2 deposited by pulsed rapid thermal chemical vapor deposition

제목
Formation of zirconium titanate from multi-layered structure of ZrO2 and TiO2 deposited by pulsed rapid thermal chemical vapor deposition
저자
이원규
발행일
2008-05-27
학회명
The 4th International Conference on Chemical and Environmental Engineering
개최국가
이집트
학회 개최일
2008-05-27 ~ 2008-05-27