반사 공압 기반 중공 노즐을 이용한 미세패턴 높이 측정

초록

This research proposed a new method to measure the height of micropattern by non-contact method using only pneumatic pressure. When a pneumatic constant pressure is through a hollow nozzle on a micropatterned object, the height of the micropattern can be measured using a pressure sensor located at the end of the nozzle. The measured pneumatic pressure depends on the height of the micropattern. Thus, the latter can be evaluated by converting pressure into distance. To verify the proposed method, the distance between the object and fabricated hollow nozzle was varied from 10 to 200 µm, and experiments were performed to investigate static responses. Furthermore, to confirm the dynamic response, experiments were performed to measure the reflected pneumatic pressure while moving the hollow nozzle over the micropattern. The static and dynamic state experiments, revealed an error of approximately 2% in the reflected pneumatic pressure.

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