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Enhanced Al-induced crystallization of silicon-rich oxide films

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Enhanced Al-induced crystallization of silicon-rich oxide films
저자
윤종환
발행일
2014-12-07
학회명
The 17th international Symposium on the Physics of Semiconductors and Applications
개최국가
대한민국
학회 개최일
2014-12-07 ~ 2014-12-11

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