Synthesis of ZnO Nanosheets by Using PECVD at Low Temperatures

초록

A simple method for fabricating ZnO nanosheets at low temperatures via PECVD is presented. The fabrication was carried out by exposing Zn nanosheets to oxygen chemical vapors at temperatures below 380 degrees C. ZnO nanosheets with well-defined crystallinity were found to be formed above at 280 degrees C. The morphological and optical properties of the ZnO nanosheets grown at 380 degrees C were characterized by using SEM, TEM, Raman, XRD and PL measurements. The resulting ZnO nanosheets were shown to have a wurtzite hexagonal structure. The Raman shift and PL peaks located near 275 cm(-1) and 370 nm, respectively, were also found, showing that nitrogen is incorporated into the nanosheets. It is suggested that the growth of ZnO nanosheets is achieved via a self-catalyzed vapor-solid mechanism.

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