CO₂ Laser 열탄소환원공정을 이용한 실리콘 나노입자 생산기술 개발

초록

Silica is the most readily available and the cheapest silicon material on Earth. Silicon shows excellent performance in many fields such as semiconductors and solar cells, and is currently a key material in industry. Although an electric arc furnace is used for mass production of silicon, there are critical disadvantages that need to be resolved. In this paper, we propose a CO₂ laser-assisted carbothermal reduction process that incorporates a laser beam as an energy source. This process can successfully reduce silica to silicon, and the products are dry nanopowders that are easy to handle. We analyzed the characteristics of the nanoparticles produced through Raman spectroscopy and electron microscopy analysis. In addition, we present the production yield and energy efficiency through a quantitative analysis for the first time.

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