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Analysis on Silica Particle Growth in TEOS/O2 Plasma Reactor

  • 김교선
제목
Analysis on Silica Particle Growth in TEOS/O2 Plasma Reactor
저자
김교선
발행일
2002-04
학회명
Theories and Application of Chem. Eng., 8(1), Annual Fall Meeting of KICHE.
개최국가
대한민국
학회 개최일
2002-04 ~ 2002-04

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