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Effect of Plasma Ignition on Growth Temperature Decrease of Single-Walled Carbon Nanotubes in Plasma-Coupled Thermal Vapor Deposition System
- 정구환;
- 조성일
- 제목
- Effect of Plasma Ignition on Growth Temperature Decrease of Single-Walled Carbon Nanotubes in Plasma-Coupled Thermal Vapor Deposition System
- 저자
- 정구환; 조성일
- 발행일
- 2019-06-11
- 학회명
- The 15th International Symposium on Sputtering & Plasma Process (ISSP 2019)
- 개최국가
- 일본
- 학회 개최일
- 2019-06-11 ~ 2019-06-14