상세 보기
Impact of oxygen source and cocktail precursor on ferroelectricity of ALD HfXZr1-XO2 thin films
- 김시준;
- Jin-Hyun Kim;
- Yong Chan Jung;
- Jiyoung Kim;
- Minjong Lee;
- 외 5명
- 제목
- Impact of oxygen source and cocktail precursor on ferroelectricity of ALD HfXZr1-XO2 thin films
- 저자
- 김시준; Jin-Hyun Kim; Yong Chan Jung; Jiyoung Kim; Minjong Lee; Seojun Lee; Dan Le; J. Spiegelman; M. Benham; 최리노
- 발행일
- 2023-07-23
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2023
- 개최국가
- 미국
- 학회 개최일
- 2023-07-23 ~ 2023-07-26