Effect of Reduction in Lateral Friction Coefficient due to Stable DLC Coating on Dicing Performance and Durability of Diamond Micro-Blades01

초록

A DLC coating was deposited onto diamond micro-blades with Cu/Sn bond metal doped with WS2 and MoS2 as a solid lubricant to enhance the cutting efficiency. In comparison with blades without the DLC coating, the blades with the DLC coating showed a decreased specific wear rate in a ball-on-disc wear test and less momentary energy consumption in a dicing test. This is ascribed to reduction of the lateral friction coefficient with the work piece. A qualitative analysis of the reduction of momentary energy consumption was carried out to evaluate the effect of DLC coating on dicing performance. Chipping sizes of the diced workpiece surfaces were reduced by the DLC coating, which is beneficial for accurate machining.

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