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ULTRA THIN HIGH QUALTY Ta₂O5 GATE DIELECTRIC PREPARED BY INSITU RAPID THERMAL

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ULTRA THIN HIGH QUALTY Ta₂O5 GATE DIELECTRIC PREPARED BY INSITU RAPID THERMAL
저자
소명기
발행일
1999-04-07
학회명
IEDM tech dig
학회 개최일
1999-04-07 ~ 1999-04-07

ScholarWorks@강원대학교

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