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Effect of Plasma Ignition on Growth Temperature Decrease of Graphene in Plasma-Coupled Thermal Chemical Vapor Deposition System
- 정구환;
- 이병주;
- 조성일
- 제목
- Effect of Plasma Ignition on Growth Temperature Decrease of Graphene in Plasma-Coupled Thermal Chemical Vapor Deposition System
- 저자
- 정구환; 이병주; 조성일
- 발행일
- 2018-08-19
- 학회명
- International Union of Materials Research Societies - International Conference on Electronic Materials 2018 (IUMRS-ICEM 2018)
- 개최국가
- 대한민국
- 학회 개최일
- 2018-08-19 ~ 2018-08-24