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Growth of poly-Si film from amorphous silicon-rich oxide using Al film as a catalyst

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Growth of poly-Si film from amorphous silicon-rich oxide using Al film as a catalyst
저자
윤종환
발행일
2015-09-13
학회명
26th International Conference on Amorphous and Nanocrystalline Semiconductors
개최국가
독일
학회 개최일
2015-09-13 ~ 2015-09-18

ScholarWorks@강원대학교

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