A study on the characterzation of ultrafine β-SiC powder synthesized by vapor phase reaction method using TMS

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제목
A study on the characterzation of ultrafine β-SiC powder synthesized by vapor phase reaction method using TMS
저자
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발행일
1998-01
개최국가
일본
학회 개최일
1998-01 ~ 1998-01