Fabrication and Electrochemical Characteristics of Crack-Resistant Si-Based Anode Materials for All-Solid-State Thin-Film Batteries

초록

A series of Si-Zr and Si-Zr-Ag films were prepared by the CO-sputtering method to examine their microstructural stability and electrochemical performances. Si-Zr thin films like Si58Zr42 and Si48Zr52, alloyed with significant proportions of Zr, show excellent cycle performance with no microstructural change to the film surfaces, although they exhibit a reduced reversible capacity. Si-Zr-Ag film shows a charge-discharge profile with a plateau-like region, in which the cycle performance and the morphological stability depend on film fabrication conditions such as the substrate and the applied bias voltage.

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