Implementation of alternative gas compositions and effects on discharge properties of atmospheric pressure plasma in decomposition of CHF3

초록

Discharge properties of atmospheric pressure plasma depend on the composition of the plasma gas. The effects of gas composition on the discharge properties of the atmospheric pressure plasma were investigated in a dielectric barrier discharge reactor immersed in an oil bath for CHF3 decomposition. A variation of the CHF3 fraction of several thousandths (0-0.8%) in the feed led to a significant change in the electrical properties of the plasma discharge when N-2 was a dilution gas; however, it did not occur with Ar or He as a dilution gas. Moreover, NZ dilution gas showed high-energy photons in the visible spectrum. (C) 2017 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.

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