Self-resonant flow sensor using resonance frequency shift by flow-induced vibration

제목
Self-resonant flow sensor using resonance frequency shift by flow-induced vibration
저자
서영호최종필
발행일
2009-01-25
학회명
22nd IEEE International Conference on Micro Electro Mechanical Systems
개최국가
이탈리아
학회 개최일
2009-01-25 ~ 2009-01-29