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The Effect of Insertion of Thin Refractory Metal On The Performance of Ta Barrier Films in Cu Metallization

  • 이성만
제목
The Effect of Insertion of Thin Refractory Metal On The Performance of Ta Barrier Films in Cu Metallization
저자
이성만
발행일
1998-08
학회명
IURMS-ICEM-98 Abstract Book
개최국가
대한민국
학회 개최일
1998-08 ~ 1998-08

ScholarWorks@강원대학교

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