proofmass-less vibration sensor using the motion of self-charged anion and cation in an electrolyte for ultra-high frequency detection

제목
proofmass-less vibration sensor using the motion of self-charged anion and cation in an electrolyte for ultra-high frequency detection
저자
서영호김광호
발행일
2008-01-13
학회명
IEEE MEMS2008
개최국가
미국
학회 개최일
2008-01-13 ~ 2008-01-13