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A Practical Approach for Designing Semiconductor Fabrication Facilities with the Unified Automated Material Handling Systems
- 제목
- A Practical Approach for Designing Semiconductor Fabrication Facilities with the Unified Automated Material Handling Systems
- 저자
- 임대은
- 발행일
- 2015-10-16
- 학회명
- 2015 International Symposium on Semiconductor Manufacturing Intelligence (ISMI 2015)
- 개최국가
- 대한민국
- 학회 개최일
- 2015-10-16 ~ 2015-10-16