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Influence of oxygen source on ferroelectricity of ALD-Hf0.5Zr0.5O2 thin films with and without capping layer
- 김시준;
- 박혜련;
- 박성빈;
- 강종묵;
- Jin-Hyun Kim;
- 외 2명
- 제목
- Influence of oxygen source on ferroelectricity of ALD-Hf0.5Zr0.5O2 thin films with and without capping layer
- 저자
- 김시준; 박혜련; 박성빈; 강종묵; Jin-Hyun Kim; Yong Chan Jung; Jiyoung Kim
- 발행일
- 2023-07-23
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2023
- 개최국가
- 미국
- 학회 개최일
- 2023-07-23 ~ 2023-07-26