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A combinatorial approach to the ferroelectric properties in HfxZr1-xO2 deposited by atomic layer deposition
- 제목
- A combinatorial approach to the ferroelectric properties in HfxZr1-xO2 deposited by atomic layer deposition
- 저자
- 김시준
- 발행일
- 2020-06-29
- 학회명
- International Conference on Atomic Layer Deposition (ALD) 2020
- 개최국가
- 벨기에
- 학회 개최일
- 2020-06-29 ~ 2020-07-01