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Half-cycle study with in-situ infrared spectroscopy of anhydrous hydrogen peroxide, ozone, and water based HfO2 atomic layer deposition for ferroelectric hafnia based device applications
- 김시준;
- Jin-Hyun Kim;
- Yong Chan Jung;
- Su Min Hwang;
- Dan N. Le;
- 외 5명
- 제목
- Half-cycle study with in-situ infrared spectroscopy of anhydrous hydrogen peroxide, ozone, and water based HfO2 atomic layer deposition for ferroelectric hafnia based device applications
- 저자
- 김시준; Jin-Hyun Kim; Yong Chan Jung; Su Min Hwang; Dan N. Le; Heber Hernandez-Arriaga; Daniel Alvarez Jr.; Jeffrey Spiegelman; K. Tan; Jiyoung Kim
- 발행일
- 2022-12-07
- 학회명
- IEEE Semiconductor Interface Specialists Conference (SISC) 2022
- 개최국가
- 미국
- 학회 개최일
- 2022-12-07 ~ 2022-12-10