Analysis on Particle Growth in Pulsed Plasma Process for Preparation of High-Quality Thin Film

  • 김교선
  • 김동주
제목
Analysis on Particle Growth in Pulsed Plasma Process for Preparation of High-Quality Thin Film
저자
김교선김동주
발행일
2009-01-13
학회명
the 10th International Symposium on Eco-Materials Processing and Design (ISEPD2009)
개최국가
중국
학회 개최일
2009-01-13 ~ 2009-01-15