Atmospheric pressure plasma of C2F6/N2 for the decomposition of C2F6 in a dielectric barrier discharge

초록

Effects of operating parameters on the decomposition of C2F6 in a mixture with N-2 were investigated in an atmospheric pressure plasma. A stretching of the Lissajous pattern and increase in intensity of voltage/current were results of the voltage variation, while the variation of frequency induced a major stretch of current intensity, and maintained the Lissajous pattern. Consumed power and conversion of C2F6 increased with the applied voltage/frequency, whereas a decrease in the total flow rate/initial C2F6 concentration led to high conversion of C2F6. A high-energy efficiency was obtained at a low applied frequency and a high initial C2F6 concentration. (c) 2017 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.

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