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oxide(Ceo₂)-incorporated new diffusion barrier for Cu metallization

  • 이성만
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oxide(Ceo₂)-incorporated new diffusion barrier for Cu metallization
저자
이성만
발행일
1997-09-31
학회명
Advanced Metallization and Interconnect Systems for ULSI, MRS
학회 개최일
1997-09-31 ~ 1997-09-31

ScholarWorks@강원대학교

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