마이크로 압전변압기 제작 및 전기-기계적 특성 분석

초록

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is 1000 ㎛ × 400 ㎛ × 4.8 ㎛ (length × width × thickness). The dynamic displacement of around 9.2 ± 0.064 ㎛ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency (Fr=8.006 KHz) and load resistance (RL) of 1 MΩ.

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