Uniform Deposition of Ultrafine SiO₂ Particles in Tube Furnace Reactor by Temperature Control in Deposition Tube

  • 김교선
제목
Uniform Deposition of Ultrafine SiO₂ Particles in Tube Furnace Reactor by Temperature Control in Deposition Tube
저자
김교선
발행일
1997-11-25
학회 개최일
1997-11-25 ~ 1997-11-25