Effect of post-growth atomic hydrogen plasma exposure on structural and electronic properties of microcrystalline silicon

  • 윤종환
제목
Effect of post-growth atomic hydrogen plasma exposure on structural and electronic properties of microcrystalline silicon
저자
윤종환
발행일
2007-08-19
학회명
22th International Conf. on Amorphous and Nanocrystalline Semiconductors
개최국가
미국
학회 개최일
2007-08-19 ~ 2007-08-19